Method of manufacturing a frame-mounted membrane

Details Method of manufacturing a frame-mounted membrane Method of manufacturing a frame-mounted membrane

1995-06-19

1996-10-29

Chilcot, Richard

Measuring and testing

Fluid pressure gauge

G01L 700

Patent

active

055698557

ABSTRACT:
In a method of manufacturing frame-mounted membranes, a first membrane layer is formed on a substrate and openings are formed in this membrane layer which are then covered by a second membrane layer, a frame structure is formed on the membrane layers around the openings and the membrane layers with the frame structure are separated from the substrate to provide the frame-mounted membranes.

REFERENCES:
patent: 4231287 (1980-09-01), Smiley
patent: 4382386 (1983-05-01), Coussot et al.
Japanese Patent Abstract, Kenji Kobayashi, "Process For Making Diaphragm by Photoetching", Oct. 21, 1976.

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