Method of manufacturing a device with micro-shutters and applica

Details Method of manufacturing a device with micro-shutters and applica Method of manufacturing a device with micro-shutters and applica

1984-11-13

1986-04-22

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156633, 156634, 156643, 156646, 156652, 156655, 156656, 1566591, 340763, 430320, B44C 122, C03C 1500, C03C 2506, C23F 102

Patent

active

045840563

ABSTRACT:
A method for manufacturing a device with micro-shutters, e.g., a light modulating device, includes the following steps: producing a first grid presenting cells; providing a plane support by depositing a layer of organic material on the grid filling the cells; producing a second grid on the layer of organic material; depositing a fine metallic layer on the second grid; cutting shutters and shutter attachments in the fine metallic layer; and removing the organic material layer in the cells to free the shutters.

REFERENCES:
patent: 3574012 (1971-04-01), Penberg
patent: 4058432 (1977-11-01), Schuster-Woldan et al.
patent: 4170512 (1979-10-01), Flanders et al.
patent: 4392914 (1983-07-01), Takenaka et al.

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