Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2006-09-05
2006-09-05
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000, C355S077000, C250S492200, C250S492220
Reexamination Certificate
active
07102732
ABSTRACT:
Various options for improving throughput in an e-beam lithography apparatus are described. A slider lens moves in synchronism with the scanning motion of the electron beam.
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Bleeker Arno Jan
de Jager Pieter Willem Herman
Kruit Pieter
van der Mast Karel Diederick
Agere Systems Guardian Corp.
Elith LLC
Mathews Alan
Pillsbury Winthrop Shaw & Pittman LLP
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