Method of manufacturing a device and device manufactured accordi

Details Method of manufacturing a device and device manufactured accordi Method of manufacturing a device and device manufactured accordi

1979-06-13

1981-10-06

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156646, 156657, 1566591, 204192E, H01L 21306, C03C 1500, C03C 2506

Patent

active

042933757

ABSTRACT:
The invention relates to a method of plasma etching a body in which a surface of the body is covered with a photolacquer mask. According to the invention the method is characterized in that the photolacquer mask to be provided exceeds the desired dimensions of the etching pattern to be formed and furthermore that the method is carried out so that the photolacquer mask is etched more rapidly than the body. An etching profile having inclined sides is obtained.

REFERENCES:
patent: 3767490 (1973-10-01), Alberts
patent: 3839177 (1974-10-01), Dimigen
patent: 3880684 (1975-04-01), Abe
patent: 3919066 (1975-11-01), Bertens
patent: 3986912 (1976-10-01), Alcorn et al.

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