Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2005-11-30
2008-10-14
Jackson, Jerome (Department: 2815)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C438S584000, C438S612000, C438S613000, C438S652000
Reexamination Certificate
active
07435680
ABSTRACT:
A method of manufacturing a circuit substrate of the present invention, includes the steps of forming an n-layered (n is an integer of 1 or more) wiring layer connected electrically to a metal plate on the metal plate, forming an electroplating layer on a connection pad portion of an uppermost wiring layer of the n-layered wiring layer by an electroplating utilizing the metal plate and the wiring layer as a plating power-supply path, and removing the metal plate.
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Mukoyama Kazuya
Nakamura Jun-ichi
Oda Sachiko
Sakaguchi Tetsuo
Yumoto Masahiro
Edwards Angell Palmer & & Dodge LLP
Ho Anthony
Jackson Jerome
Shinko Electric Industries Co. Ltd.
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