Method of manufacturing a bubble-jet type ink-jet printhead

Metal working – Method of mechanical manufacture – Fluid pattern dispersing device making – e.g. – ink jet

Reexamination Certificate

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Details

C029S611000, C029S617000, C029S619000, C029S621000, C216S002000, C347S047000, C347S063000, C347S065000

Reexamination Certificate

active

06868605

ABSTRACT:
A bubble-jet type ink-jet printhead and manufacturing method thereof including a substrate integrally having an ink supply manifold, an ink chamber, and an ink channel; a nozzle plate having a nozzle on the substrate; a heater centered around the nozzle and an electrode for applying current to the heater on the nozzle plate; and an adiabatic layer on the heater for preventing heat generated by the heater from being conducted upward from the heater. Alternatively, a bubble-jet type ink-jet printhead may be formed on a silicon-on-insulator (SOI) wafer having a first substrate, an oxide layer, and a second substrate stacked thereon and include an adiabatic barrier on the second substrate. In the bubble-jet type ink-jet printhead and manufacturing method thereof, the adiabatic layer or the adiabatic barrier is provided to transmit most of the heat generated by the heater to ink under the heater, thereby increasing energy efficiency.

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Tseng, et al., “A Novel Microinjector with Virtual Chamber Neck”, 11thIEEE Workshop on MEMS, Heidelberg, Germany (Jan. 25-29, 1998).

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