Method of manufacture of SRAM with SIPOS resistor

Details Method of manufacture of SRAM with SIPOS resistor Method of manufacture of SRAM with SIPOS resistor

1994-07-25

1995-11-28

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437 47, 437 60, 437918, H01L 2170, H01L 2700

Patent

active

054707790

ABSTRACT:
A method of manufacture of a semiconductor device on a semiconductor substrate including an SRAM cell with a resistor comprises formation of a polysilicon 1 layer on said semiconductor substrate. The polysilicon 1 layer is patterned and etched. An interpolyslicon layer is formed over the polysilicon 1 layer, patterned and etched forming an opening through the interpolysilicon layer exposing a contact area on the surface of the polysilicon 1 layer. A SIPOS layer forms a resistor material over the interpolysilicon layer in contact with the polysilicon 1 layer through the opening. A load resistor mask is formed over a load resistor region to be formed in the SIPOS layer, and ions are implanted in the remainder of the SIPOS layer not covered by the load resistor mask to convert the remainder of the SIPOS layer from a resistor into an interconnect structure integral with a load resistor in the load resistor region.

REFERENCES:
patent: 4702937 (1987-10-01), Yamoto et al.
patent: 4717681 (1988-01-01), Curran
patent: 4950620 (1990-08-01), Harrington, III
patent: 4961103 (1990-10-01), Saitoh et al.
patent: 4965214 (1990-10-01), Choi et al.
patent: 5200356 (1993-04-01), Tanaka
Wolf et al., Silicon Processing for the VLSI Era vol. 1 p. 195, 1986.
Wolf, Silicon Processing for the VLSI Era, vol. 2 pp. 196, 581-583.
"VLSI Technology" by S. M. Sze, McGraw-Hill Book Co., N.Y. N.Y. p. 248, 1986.

Affiliated with

Also associated with

Rating

Method of manufacture of SRAM with SIPOS resistor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of manufacture of SRAM with SIPOS resistor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of manufacture of SRAM with SIPOS resistor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2013200