Method of manufacture of a soft-X-ray mask

Details Method of manufacture of a soft-X-ray mask Method of manufacture of a soft-X-ray mask

1977-05-26

1979-10-09

Massie, Jerome W.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156236, 156246, 156278, 156632, 156633, 156634, 156643, 156656, 156657, 156663, 204192E, 250492R, 250492R, 250505, 427250, 427385A, G21F 504

Patent

active

041705122

ABSTRACT:
A process for fabricating polyimide membrane x-ray lithography masks is described. Thin membrane of polyimide is formed by spinning polyamic acid on a glass substrate and polymerizing in situ. The glass substrate acts as a holder and efficient heat sink during formation of gold absorber patterns on top of the polyimide. A support ring is then bonded to the polyimide, and the glass etched in dilute HF. Optically smooth polyimide membranes with thicknesses from 0.5 to 5 .mu.m are readily achieved. The method and resulting product is not limited to the above materials or to masks.

REFERENCES:
patent: 3179634 (1965-04-01), Edwards
patent: 3607997 (1971-09-01), Linturn
patent: 3742230 (1973-06-01), Spears et al.
patent: 3767494 (1973-10-01), Muroqka et al.
patent: 3873824 (1975-03-01), Bean et al.
patent: 3892973 (1975-07-01), Coquin et al.
patent: 3930914 (1976-01-01), Hetrich
patent: 4037111 (1977-07-01), Coquin et al.

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