Method of manufacture of a dual chamber single vertical...

Details Method of manufacture of a dual chamber single vertical... Method of manufacture of a dual chamber single vertical...

1998-07-10

2002-12-10

Utech, Benjamin L. (Department: 1765)

Etching a substrate: processes

Forming or treating thermal ink jet article

C347S044000, C347S054000, C438S021000

Reexamination Certificate

active

06491833

ABSTRACT:

STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT
Not applicable.
FIELD OF THE INVENTION
The present invention relates to the field of inkjet printing and, in particular, discloses A Method of Manufacture of a Dual Chamber Single Vertical Actuator Ink Jet Printer.
BACKGROUND OF THE INVENTION
Many ink jet printing mechanisms are known. Unfortunately, in mass production techniques, the production of ink jet heads is quite difficult. For example, often, the orifice or nozzle plate is constructed separately from the ink supply and ink ejection mechanism and bonded to the mechanism at a later stage (Hewlett-Packard Journal, Vol. 36 no 5, pp33-37 (1985)). These separate material processing steps required in handling such precision devices often add a substantial expense in manufacturing.
Additionally, side shooting ink jet technologies (U.S. Pat. No. 4,899,181) are often used but again, this limits the amount of mass production throughput given any particular capital investment.
Additionally, more esoteric techniques are also often utilized. These can include electroforming of nickel stage (Hewlett-Packard Journal, Vol. 36 no 5, pp33-37 (1985)), electro-discharge machining, laser ablation (U.S. Pat. No. 5,208,604), micro-punching, etc.
The utilization of the above techniques is likely to add substantial expense to the mass production of ink jet print heads and therefore add substantially to their final cost.
It would therefore be desirable if an efficient system for the mass production of ink jet print heads could be developed.
SUMMARY OF THE INVENTION
It is an object of the present invention to provide a method of manufacture of a Dual Chamber Single Vertical Actuator Ink Jet Printer.
In accordance with a first aspect of the present invention, there is provided a method of manufacturing a Dual Chamber Single Vertical Actuator Ink Jet Printer print head wherein an array of nozzles are formed on a substrate utilizing planar monolithic deposition, lithographic and etching processes. Preferably, multiple ink jet heads are formed simultaneously on a single planar substrate such as a silicon wafer.
The print heads can be formed utilizing standard vlsi/ulsi processing and can include integrated drive electronics formed on the same substrate. The drive electronics preferably being of a CMOS type. In the final construction, ink can be ejected from the substrate substantially normal to the substrate.


REFERENCES:
patent: 4611219 (1986-09-01), Sugitani et al.
patent: 5063655 (1991-11-01), Lamey et al.
patent: 5211806 (1993-05-01), Wong et al.
patent: 5909227 (1999-06-01), Silverbrook

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