Method of making x-ray masks

Details Method of making x-ray masks Method of making x-ray masks

1980-07-25

1983-05-24

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156657, 2505051, 430 5, B44C 122, C03C 1500, C03C 2506

Patent

active

043849199

ABSTRACT:
An x-ray mask is made by forming a thin polyimide membrane on a silicon wafer substrate which is then back-etched to form a mask supporting ring of the substrate.

REFERENCES:
patent: 3742230 (1973-06-01), Spears et al.
patent: 3841930 (1974-10-01), Hetrich
patent: 4037111 (1977-07-01), Coquin et al.
patent: 4170512 (1979-10-01), Flanders et al.

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