Method of making two-component nanospheres and their use as a lo

Details Method of making two-component nanospheres and their use as a lo Method of making two-component nanospheres and their use as a lo

1997-09-04

1998-09-01

Bowers, Jr., Charles L.

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

438624, 438778, 438781, 427 96, 427204, 427214, H01L 2131

Patent

active

058010920

ABSTRACT:
This invention provides a process for making an insulation layer for use in microelectronic devices, whereby capacitive coupling and propagation delay in the microelectronic devices are reduced. This invention can include the formation of a stable solution of spherical particles consisting of a ceramic core 10 and a non-polar coating 20. This solution can be applied to an microelectronic substrate, and dried to form a continuous, porous layer. Novel methods are disclosed for bonding these particles together into an integral layer. Porous layers formed by the process of this invention possess a very low dielectric constant, and can be produced using equipment and techniques common and available to those skilled in the art of microelectronic fabrication.

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R. E. Geer; D. A. Stenger; M. S. Chen; J. M. Calvert; R. Shashidhar; Y. H. Jeong; P. S. Pershan; Langmuir; X-ray and Ellipsometric Studies of Self-Assembled Monolayers of Fluorinated Chlorosilanes; Apr. 1, 1994; 6pgs .

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