Method of making transparent anti-reflective coating

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

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427164, 427166, 427167, 156 99, C23C 1434

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051714140

ABSTRACT:
An anti-reflective coating employing silicon as a high refractive index material in a film pair together with silicon dioxide as a low refractive index material is found to be substantially transparent to visible light and to provide good anti-reflectance where the silicon film is ultra-thin, preferably less than about 50 Angstroms and the thickness of the silicon dioxide film is matched to that of the silicon film. Laminated glazing units having such anti-reflective film can be used, for example, even in applications requiring high transmittance of visible light, such as motor vehicle windshields, in view of the substantial transparency of the coating.

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