Method of making thin film anatase titanium dioxide

Details Method of making thin film anatase titanium dioxide Method of making thin film anatase titanium dioxide

2007-06-01

2009-12-15

Le, Dung A. (Department: 2818)

Semiconductor device manufacturing: process

Coating of substrate containing semiconductor region or of...

Insulative material deposited upon semiconductive substrate

C438S788000, C438S782000, C438S778000

Reexamination Certificate

active

07632761

ABSTRACT:
A method for producing a thin film titanium dioxide is disclosed. The disclosed method for producing the thin film titanium dioxide includes performing a magnetron reactive sputtering process to vaporize at least portions of a titanium source in a sputtering chamber that is supplied with gaseous oxygen. The vaporized titanium reacts with the oxygen to form anatase titanium dioxide, which is deposited on a substrate within the sputtering chamber.

REFERENCES:
patent: 6420742 (2002-07-01), Ahn et al.
patent: 7378356 (2008-05-01), Zhang et al.
patent: 2003/0056928 (2003-03-01), Kubota et al.
patent: 2006/0071592 (2006-04-01), Narasimhan et al.
patent: 2007/0082205 (2007-04-01), Anzaki et al.
Banfield, Jillian F., Veblen, David R., “Conversion of perovskite to anatase and TiO2(B): A TEM study and the use of fundamental building blocks for understanding relationships about the TiO2minerals”,American Minerologist, vol. 77, pp. 545-557 (1992).
Bellows, Richard J., Marucchi-Soos, Elise P., Buckley, D. Terence, “Analysis of Reaction Kinetics for Carbon Monoxide and Carbon Dioxide on Polycrystalline Platinum Relative to Fuel Cell Operation”,Industrial and Engineering Chemistry Research, vol. 35, pp. 1235-1242 (1996).
Carp, O.; Huisman, C.L.; Reller, A., “Photoinduced reactivity of titanium dioxide”,Progress in Solid State Chemistry, vol. 32, pp. 33-177 (2004).
Fuel Cell Handbook(7thEd.), EG&G Technical Services, Inc., U.S. Department of Energy, Morgantown, WV, (2004).
Hart, J.N.; Cervini, R.; Cheng, Y.-B.; Simon, G.P.; Spiccia, L., “Formation of anatase TiO2by microwave processing”,Solar Energy Materials&Solar Cells, vol. 84, pp. 135-143 (2004).
Kay, H.F. and Bailey, P.C., “Structure and Properties of CaTiO3”,Acta Crystallographica, vol. 10, pp. 219-226 (1957).
Latroche, M., Brohan, L., Marchand, R., and Tournoux, M., “New Hollandite Oxides: TiO2(H) and K0.06TiO2”Journal of Solid State Chemistry, pp. 78-82 (1989).
Simons, P.Y. and Dachille, F., The Structue of TiO2II, a high-pressure phase of TiO2,Acta Crystallographica, vol. 23, pp. 334-336 (1967).
Tazawa, Masato; Okada, Masahisa; Kazuki, Yoshimura; Ikezawa, Shunjiro, “Photo-catalytic heat mirror with a thick titanium dioxide layer”,Solar Energy Material&Solar Cells, vol. 84, pp. 159-170 (2004).
Toutoungi, Danielle; Hartick, Johannes, “The Carbon Monoxide Sensing Challenge”, Cambridge Consultants, Cambridge, England, UK.

Affiliated with

Also associated with

Rating

Method of making thin film anatase titanium dioxide does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of making thin film anatase titanium dioxide, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of making thin film anatase titanium dioxide will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4121168