Method of making planar thin film transistors, transistor arrays

Details Method of making planar thin film transistors, transistor arrays Method of making planar thin film transistors, transistor arrays

1980-06-02

1983-06-21

Smith, John D.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

430311, 430315, 427 86, 427 96, 427259, 29571, H01L 2184

Patent

active

043894810

ABSTRACT:
A planar thin film transistor is described wherein each element of the transistor structure is disposed in a planar relationship with respect to the next adjacent layer. The method of manufacture generally includes the steps of depositing one of the elemental members of a thin film transistor structure and filling in the valleys between the elemental structure with an insulating material to form a planar surface which, in turn, forms the surface upon which the next planar layer is formed.

REFERENCES:
patent: 3669661 (1972-06-01), Page
patent: 4035276 (1977-07-01), Havas
patent: 4040073 (1977-08-01), Luo
patent: 4040854 (1977-08-01), Luo et al.
patent: 4055885 (1977-11-01), Takemoto
patent: 4090006 (1978-05-01), Havas
patent: 4181755 (1980-01-01), Liu
Brody et al., "A 6.times.6 Inch 20 Lines-Per-Inch Liquid Crystal Display Panel", IEEE Transactions of Electron Devices, vol. ED-20, No. 11, Nov. 1973.

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