Method of making microstructure device, and microstructure...

Details Method of making microstructure device, and microstructure... Method of making microstructure device, and microstructure...

2011-01-18

2011-01-18

Loney, Donald (Department: 1783)

Stock material or miscellaneous articles

Structurally defined web or sheet

Superposed movable attached layers or components

C428S172000, C359S883000, C257S635000, C257S678000, C073S504120, C073S504140

Reexamination Certificate

active

07871687

ABSTRACT:
A microstructure device is made by processing a material substrate consisting of e.g. a first process layer, a second process layer and a middle layer arranged between the first and the second process layers. The microstructure device includes a first structural part and a second structural part that has a portion facing the first structural part via a gap. The first and the second structural parts are connected to each other by a connecting part extending across the gap. This connecting part is formed in the first process layer to be in contact with the middle layer. The microstructure device also includes a protective part extending from the first structural part toward the second structural part or vice versa. The protective part is formed in the first or second process layer to be in contact with the middle layer.

REFERENCES:
patent: 5668316 (1997-09-01), Iwai et al.
patent: 5721377 (1998-02-01), Kurle et al.
patent: 09-033557 (1997-02-01), None
patent: 2003-19700 (2003-01-01), None
patent: 2004-341364 (2004-12-01), None
patent: 2006-72252 (2006-03-01), None

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