Method of making metal electrode of semiconductor device

Details Method of making metal electrode of semiconductor device Method of making metal electrode of semiconductor device

1979-10-05

1981-10-06

Smith, John D.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

204 15, 427 89, 427 90, 430315, 430318, H01L 21283, H01L 21288

Patent

active

042936373

ABSTRACT:
Method of making metal electrode, characterized by having the steps of:

REFERENCES:
patent: 3462349 (1969-08-01), Gokgenyi
patent: 3737380 (1973-06-01), Bachmeier
patent: 3761309 (1973-09-01), Schmitter
patent: 3809625 (1974-05-01), Brown
patent: 3821785 (1974-06-01), Rose
patent: 4042954 (1977-08-01), Harris
patent: 4057659 (1977-11-01), Pammer
patent: 4182781 (1980-01-01), Hooper et al.
patent: 4188438 (1980-02-01), Burns
A. van der Drift et al., "Integrated Circuits with Leads on Flexible Tape", Solid State Technology, Feb. 1976.
Lyman "Special Report: Film Carriers Star in High-Volume I. C. Production", Electronics, Dec. 1975
Sakane, Internepcon Japan Seminar Program, Jan. 22-25, 1975 I. C. Assembly Process by Mini Mod Method.
Zihoy, Publication of Oki Electric Co., Ltd., vol. 37, No. 3, pp. 100-108, Oct. 1970.

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