Method of making low work function component

Details Method of making low work function component Method of making low work function component

2008-08-27

2011-11-15

Everhart, Caridad (Department: 2895)

Semiconductor device manufacturing: process

Introduction of conductivity modifying dopant into...

Diffusing a dopant

C438S563000, C257SE21482, C257SE21470, C257SE21140

Reexamination Certificate

active

08058159

ABSTRACT:
A method for fabricating a component is disclosed. The method includes: providing a member having an effective work function of an initial value, disposing a sacrificial layer on a surface of the member, disposing a first agent within the member to obtain a predetermined concentration of the agent at said surface of the member, annealing the member, and removing the sacrificial layer to expose said surface of the member, wherein said surface has a post-process effective work function that is different from the initial value.

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