Fishing – trapping – and vermin destroying
Patent
1991-12-05
1993-07-20
Thomas, Tom
Fishing, trapping, and vermin destroying
437 25, 437 26, 437174, 437247, 437248, 148DIG90, H01L 2126
Patent
active
052293220
ABSTRACT:
An inexpensive and reliable technique for forming connections to a substrate or buried layer of a semiconductor structure employs a laser to melt a small, selected region of a lightly doped layer and a highly doped underlying layer. Extremely rapid diffusion of impurities and mixing of materials within the liquid phase of the melt quickly creates a uniformly doped conductive region when the melt is allowed to recrystallize.
REFERENCES:
patent: 3940289 (1976-02-01), Marquardt et al.
patent: 4188710 (1980-02-01), Davey et al.
patent: 4234356 (1980-11-01), Auston et al.
patent: 4257824 (1981-03-01), Jackson et al.
patent: 4431460 (1984-02-01), Barson et al.
patent: 4489479 (1984-12-01), Shields et al.
patent: 4569701 (1986-02-01), Oh
patent: 4571275 (1986-02-01), Moksvold
R. T. Young, "Substrate Heating and Emitter Dopant Effects in Laser Annealed Cells" App. Phys. Lett. 39(4), Aug. 15 1981.
Anantha et al. "Laser Annealing Method For Making Heavily Doped Emitter Transistor" IBM TDB vol. 22, No. 2 Jul. 1979 pp. 575-576.
IBM Technical Disclosure Bulletin, Chu et al.; vol. 25, No. 1; Jun. 1982.
Chu Shao-Fu S.
Kim Kyong-Min
Mei Shaw-Ning
Saccamango Mary J.
Vigliotti Donald R.
International Business Machines - Corporation
Thomas Tom
LandOfFree
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