Method of making LiNbO.sub.3 channel optical guides

Details Method of making LiNbO.sub.3 channel optical guides Method of making LiNbO.sub.3 channel optical guides

1992-05-11

1994-10-18

Nguyen, Nam

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

427162, 430321, C23C 1434, G03C 500

Patent

active

053565231

ABSTRACT:
A manufacturing process for high performance single mode channel optical guides of the LiNbO.sub.3 using five successive steps: photo-etched optical path definition, deposition of the dielectric layer, lift-off definition of the channels, proton exchange and thermal cycling. The method can be used to produce multi-function devices to be interfaced with optical fibers to obtain sensors, telecommunications devices and devices for processing wide-band microwave signals the proton exchange is affected in benzoic acid diluted with lithium benzoate and eliminates the time instability of the electro-optical structure due to the presence of an insulating layer above the optical guide.

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