Method of making integrated optical component

Details Method of making integrated optical component Method of making integrated optical component

1988-11-16

1990-06-12

Michl, Paul R.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

430 4, 430 22, 430321, 430329, 430394, 350 9612, 350 963, 350 9633, 350 9611, G02B 726

Patent

active

049332627

ABSTRACT:
A method of making an integrated optical component in which a central planar region includes an optical circuit path and a lateral region includes an optical fiber positioning groove in alignment with the path. A glass body having central and lateral regions is coated with a mask material. A photolithographic technique is used to provide the mask material with a patterned opening in the central region corrsponding in shape to the circuit path and a patterned opening in the lateral region corresponding to the shape of the alignment groove. A layer of resisting material is applied over the mask on the central region and the lateral region is etched to form the groove. The layer of resisting material is removed, and the zone of the central region that is exposed by the opening in the mask is subjected to an ion exchange process in order to form therein an optical path that is in registration with the fiber positioning groove.

REFERENCES:
patent: 4466696 (1984-08-01), Carney
patent: 4765702 (1988-08-01), Dohan et al.
L. P. Bovin, "Thin-Film Laser-to-Fiber Coupler", Applied Optics, Feb. 74, vol. 13, No. 2, pp. 391-395.
J. T. Boyd et al., "Optical Coupling from Fibers to . . . ", Applied Optics, Mar. 15, 1978, vol. 17, No. 6, pp. 895-898.

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