Semiconductor device manufacturing: process – Having biomaterial component or integrated with living organism
Reexamination Certificate
2011-08-02
2011-08-02
Huynh, Andy (Department: 2818)
Semiconductor device manufacturing: process
Having biomaterial component or integrated with living organism
C438S105000, C438S122000, C257S040000, C257SE23145, C257SE51040, C977S742000, C977S842000
Reexamination Certificate
active
07989222
ABSTRACT:
A conductive layer in an integrated circuit is formed as a sandwich having multiple sublayers, including at least two sublayers of oriented carbon nanotubes. A first sublayer is created by growing carbon nanotubes in a first direction parallel to the chip substrate from a catalyst in the presence of a reactant gas flow in the first direction, and a second sublayer is created by growing carbon nanotubes in a second direction parallel to the substrate and different from the first direction from a catalyst in the presence of a reactant gas flow in the second direction. The first and second directions are preferably substantially perpendicular. The conductive layer sandwich preferably contains one or more additional sublayers of a conductive material, such as a metal.
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Furukawa Toshiharu
Hakey Mark Charles
Holmes Steven John
Horak David Vaclav
Koburger III Charles William
Huynh Andy
International Business Machines - Corporation
Truelson Roy W.
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