Method of making fiber probe devices using patterned reactive io

Details Method of making fiber probe devices using patterned reactive io Method of making fiber probe devices using patterned reactive io

1993-12-22

1995-03-07

Bowers, Jr., Charles L.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

430321, 385123, 385902, 156643, 156650, 1566591, C03C 2506

Patent

active

053957415

ABSTRACT:
A fiber probe is formed from a cladded optical fiber segment by isotropically etching a lower portion of the fiber segment, followed by cleaving the resulting etched lower portion. The resulting cleaved endface of the fiber segment is then coated with a protective layer which is then patterned by exposure to optical radiation propagating down the core of the fiber segment followed by development. A plasma etching, masked by the thus patterned protective layer, removes a desired height of cladding in the neighborhood of the cleaved endface. Finally, the lower regions of the fiber segment are subjected to a further etching to reduce the width of the tip to a desired value.

REFERENCES:
patent: 3883353 (1975-05-01), Cohen et al.
patent: 4469554 (1984-09-01), Turner
patent: 4604520 (1986-08-01), Pohl
patent: 5018865 (1991-05-01), Ferrell et al.
patent: 5105305 (1992-04-01), Betzig et al.
patent: 5168538 (1992-12-01), Gillespie
patent: 5272330 (1993-12-01), Betzig et al.
H. Kumar Wickramasinghe, "Scanned-Probe Microscopes," Scientific American, vol. 261, No. 4, pp. 98-105 (Oct. 1989).
G. Binnig et al., "Atomic Force Microscope," Phys. Rev. Lett., vol. 56, No. 9, Mar. 3, 1986, pp. 930-933.
Pangaribuan, T. et al., "Reproducible Fabrication Technique of Nanometric Tip Diameter Fiber Probe For Photon Scanning Tunneling Microscope," Japan Journal Applied Physics, vol. 31 (1992), pp. L 1302-L 1304, Part 2, No. 9A, 1 Sep. 1992.

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