Method of making EPROM cell with reduced programming voltage

Metal treatment – Compositions – Heat treating

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29571, 29576B, 148187, 357 91, H01L 2122, H01L 2126

Patent

active

045198497

ABSTRACT:
An improved floating gate MOS EPROM cell which is programmable at a lower potential (12 volts) than prior art devices which often require 25 volts. The oxide thickness between the floating gate and overlying control gate is thicker at the edges of the floating gate than in the central portion. The thicker oxide at the edges prevents uncontrolled DC erasing. This allows a thinner oxide to be used in the central portion and provides the increased capacitance coupling needed for programming at a lower potential.

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patent: 4373248 (1983-02-01), McElroy
patent: 4409727 (1983-10-01), Dalton, Jr. et al.
patent: 4426764 (1984-01-01), Kosa et al.

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