Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1991-12-03
1993-12-14
Weisstuch, Aaron
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
29603, 20419223, 427129, 427131, C23C 1434, G11B 5127
Patent
active
052698955
ABSTRACT:
A surface smooth enough to allow the formation thereon of a single domain magnetic element is obtained by covering a polished layer with a thin layer of the same material, to smooth sharp edges and corners. The resulting structure is useful in thin film magnetic heads.
REFERENCES:
patent: 4642162 (1987-02-01), Brownell et al.
patent: 4841624 (1989-06-01), Togawa et al.
patent: 5068959 (1991-12-01), Sidman
T. N. Kennedy, J. Vac. Sci. Technol., vol. 13, No. 6, Nov.-Dec. 1976, pp. 1135-1137.
Kirchberg John
Michalek Paul F.
Rice John A.
Fox John C.
North American Philips Corporation
Weisstuch Aaron
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