Method of making cold shield for infrared detector array

Details Method of making cold shield for infrared detector array Method of making cold shield for infrared detector array

1981-11-06

1982-12-28

Powell, William A.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

29572, 156644, 156652, 1566611, 427 74, 430313, 430318, C23F 102

Patent

active

043662293

ABSTRACT:
An infrared detector array and its associated read-out conductors on a surate are covered with an electrically insulating photoresist layer. This layer is metalized, and a thin photoresist layer is applied atop the metal. The thin photoresist layer is exposed through a mask having perforations corresponding to the detectors of the array and to desired bonding lead regions on the conductors; when the layer is developed, regions of the metal are thus uncovered. These uncovered regions are then etched away and the insulating photoresist layer is exposed and developed, with the remaining metal acting as a mask. The thin photoresist layer may be stripped any time after the metal is etched. An array is produced in which regions above and closely around the detectors are uncovered, and regions on the read-out conductors are uncovered. Bonding leads may be applied to the read-out conductors in their exposed regions.

REFERENCES:
patent: 3962778 (1976-06-01), Palmer
patent: 3978580 (1976-09-01), Leupp et al.
patent: 4184909 (1980-01-01), Chang et al.
patent: 4313022 (1982-01-01), Jordan et al.

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