Method of making antireflective coatings

Details Method of making antireflective coatings Method of making antireflective coatings

1996-08-16

1998-07-21

Weisstuch, Aaron

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

20419226, 20419227, 2041923, 359585, 359586, 359589, 428216, 428332, 428336, C23C 1434

Patent

active

057830495

ABSTRACT:
An improved way to impart antireflection properties to light transmissive substrates and, at the same time, achieve a durable surface and electrical conductivity is disclosed. A stack of at least two sputter-deposited light transmissive inorganic layers, one of which being electrically conductive and having a high index of refraction with the one above it (relative to the substrate being antireflected) having a low index of refraction, in combination with a thin lubricating overlayer comprising a solvent-soluble lubricant such as a solvent-soluble fluoropolymer can achieve this desired combination of properties.

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