Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Simultaneous radiation imaging and etching of substrate
Patent
1979-06-11
1981-09-08
Kimlin, Edward C.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Simultaneous radiation imaging and etching of substrate
156643, 156659, 156664, 346 76L, 427 431, 427 531, 427271, 430 5, 430296, 430323, 430325, 430326, 430394, 430502, 430945, G03C 500
Patent
active
042885280
ABSTRACT:
An improved process for forming an embossed pattern through the use of a writing concentrated beam opening holes in a film capable of undergoing residue free evaporation. A layer of photoresist is overlayed with the film and upon being exposed and processed the layer supplies the prospective embossed pattern.
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Kodak Autopositive Resist, Type 3; 1969.
Dubois Jean C.
Duda Eugene
Marchal Michel
Picquendar Jean E.
"Thomson-CSF"
Kimlin Edward C.
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