Method of making an electrostatic actuator

Details Method of making an electrostatic actuator Method of making an electrostatic actuator

2005-08-23

2005-08-23

Trinh, Michael (Department: 2822)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

C052S053000, C052S393000, C052S652100, C052S686000

Reexamination Certificate

active

06933165

ABSTRACT:
A method of fabricating an electrostatic actuator with an intrinsic stress gradient is provided. An electrode is formed on a substrate and a support layer is formed over the electrode. A metal layer is deposited onto the support layer via a deposition process. Deposition process conditions are varied in order to induce a stress gradient into the metal layer. The intrinsic stress in the metal layer increases in the direction from the bottom to the top of the metal layer. The support layer under the electrode is removed to release the electrostatic actuator.

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