Method of making an electronic device and the same

Details Method of making an electronic device and the same Method of making an electronic device and the same

1999-06-10

2000-10-03

Chaudhuri, Olik

Semiconductor device manufacturing: process

Formation of semiconductive active region on any substrate

438 39, 438410, H01L 2120

Patent

active

061272469

ABSTRACT:
Laminated layers including semiconductor or metal thin layers and insulative thin layers are formed on a substrate and after the laminated layers are patterned, and the laminated layers are oxidized from their side to form an oxidized area. This way, a 0-dimensional quantum box or one-dimensional quantum line having fine tunnel junctions surrounded by the oxidized area and a 0-dimension quantum box or a one-dimensional quantum line made of semiconductor or metal area interposed between the oxidized area and the insulative thin layers are formed in the laminated layers.

REFERENCES:
patent: 4704622 (1987-11-01), Capasso et al.
patent: 5138405 (1992-08-01), Kuzuhara
patent: 5372675 (1994-12-01), Wakabayashi et al.
patent: 5444267 (1995-08-01), Okada et al.
patent: 5600163 (1997-02-01), Yano et al.
patent: 5646418 (1997-07-01), Frazier et al.
patent: 5710436 (1998-01-01), Tanamoto et al.
patent: 5714766 (1998-02-01), Chen et al.
Applied Physics, vol. 63, No. 12, 1994, pp. 1232-1238.
The Journal of Institute of Electronics, Information and Communication Engineers of Japan, vol. 11, 1994, pp. 1117-1124.
Journal of Non-Crystalline Solids, vol. 128, 1991, pp. 91-100.
Journal of Vacuum Science and Technology, vol. B11, 1993, pp. 2532-2537.
1997 American Institute of Physics Letter, vol. 70, No. 3, Jan. 20, 1997, pp. 333-335.
1996 Electronic Materials Conference, Jun. 26-28, 1996.

Affiliated with

Also associated with

Rating

Method of making an electronic device and the same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of making an electronic device and the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of making an electronic device and the same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-194795