Method of making an electrode assembly for plasma processing...

Details Method of making an electrode assembly for plasma processing... Method of making an electrode assembly for plasma processing...

2009-05-07

2010-11-09

Phan, Thiem (Department: 3729)

Metal working

Spectacle-frame making

C029S874000, C029S876000, C029S877000, C156S345330, C156S345470

Reexamination Certificate

active

07827657

ABSTRACT:
A method of making an electrode assembly for a plasma processing apparatus includes securing a backing member to an electrode wherein first fastener members mounted in apertures in the backing member cooperate with second fastener members to hold the electrode assembly to a support member, such as a temperature-controlled top plate in a plasma processing chamber.

REFERENCES:
patent: 4270999 (1981-06-01), Hassan et al.
patent: 4585920 (1986-04-01), Hoog et al.
patent: 4612077 (1986-09-01), Tracy et al.
patent: 5423936 (1995-06-01), Tomita et al.
patent: 5449410 (1995-09-01), Chang et al.
patent: 5534751 (1996-07-01), Lenz et al.
patent: 5567243 (1996-10-01), Foster et al.
patent: 5569356 (1996-10-01), Lenz et al.
patent: 5628829 (1997-05-01), Foster et al.
patent: 5641389 (1997-06-01), Strauss et al.
patent: 5647911 (1997-07-01), Vanell et al.
patent: 5681135 (1997-10-01), Simonson
patent: 5766364 (1998-06-01), Ishida et al.
patent: 5906683 (1999-05-01), Chen et al.
patent: 6073577 (2000-06-01), Lilleland et al.
patent: 6123775 (2000-09-01), Hao et al.
patent: 6187152 (2001-02-01), Ting et al.
patent: 6192827 (2001-02-01), Welch et al.
patent: 6194322 (2001-02-01), Lilleland et al.
patent: 6207006 (2001-03-01), Katoh
patent: 6302964 (2001-10-01), Umotoy et al.
patent: 6409897 (2002-06-01), Wingo
patent: 6461435 (2002-10-01), Littau et al.
patent: 6468925 (2002-10-01), Campbell et al.
patent: 6818096 (2004-11-01), Barnes et al.
patent: 6827815 (2004-12-01), Hytros et al.
patent: 2002/0108711 (2002-08-01), Kim
patent: 2004/0074609 (2004-04-01), Fischer et al.
patent: 4316709 (1992-11-01), None
U.S. Appl. No. 10/623,540, filed Jul. 11, 2003.

Affiliated with

Also associated with

Rating

Method of making an electrode assembly for plasma processing... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of making an electrode assembly for plasma processing..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of making an electrode assembly for plasma processing... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4197363