Method of making an acceleration sensor

Details Method of making an acceleration sensor Method of making an acceleration sensor

1992-06-17

1994-05-10

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156633, 156651, 156657, 156662, 148DIG159, 437901, 437921, H01L 21306, B44C 122, C03C 1500

Patent

active

053104501

ABSTRACT:
A method of making acceleration sensors with integrated measurement of internal pressure includes connecting multiple plates to each other, thereby defining internal cavities. The tightness of these connections or bonds is checked and controlled during the manufacturing process. The plates define membrane portions adjacent each cavity, the membranes deforming in accordance with the internal pressure in the adjacent cavity. Preferably, the internal pressure of the sensor is measurable by detecting deformation of a sensor wall which defines a membrane.

REFERENCES:
patent: 4851080 (1989-07-01), Howe et al.
patent: 5095752 (1992-03-01), Suzuki et al.
patent: 5169472 (1992-12-01), Goebel
Roy Lance et al., A Batch-Fabricated Silicon Accelerometer, IEEE Transactions on Electron Devices, vol. ED-26, No. 12, Dec. 1979.
Theresa Lober & Roger Howe, "Surface Micro-Machining Processes for Electrostatic Microactuator Fabrication," 1988, IEEE Publication THO215-4/88/000-0059.
Masaru Shimbo et al./Toshiba, "A Newly Developed Silicon to Silicon Direct Adhesion Method,", Jour. of the Electrochemical Society, Extended Abstracts vol. 86-1, p. 337, 1986.

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