Method of making a soft metal conductor

Details Method of making a soft metal conductor Method of making a soft metal conductor

1997-07-29

2000-02-29

Bowers, Charles

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

438686, 438687, 438688, 438692, H01L 2144

Patent

active

060308958

ABSTRACT:
A soft metal conductor for use in a semiconductor device that has an upper-most layer consisting of grains having grain sizes sufficiently large so as to provide a substantially scratch-free surface upon polishing in a subsequent chemical mechanical polishing step.

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Journal of Vacuum Science and Technology, Part A, vol. 5, No. 4, Jul., 1987-Aug., 1987, New York US, pp. 2088-2091, XP002005739 T. Kobayashi et al.

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