Method of making a semiconductor variable capacitor

Details Method of making a semiconductor variable capacitor Method of making a semiconductor variable capacitor

1999-07-26

2000-08-29

Monin, Jr., Donald L.

Semiconductor device manufacturing: process

Voltage variable capacitance device manufacture

438397, 438254, 438 52, 438745, 357312, 357313, 357419, H01L 2120

Patent

active

061107913

ABSTRACT:
A variable capacitor in a semiconductor device is described in which the capacitance is varied by the movement of a dielectric material in the space between the plates of the capacitor in response to an external stimulus. A method of making such a variable capacitor is also described in which the capacitor is built in a layered structure with the top layer including a portion of dielectric material extending into the space between the capacitor plates. After formation of the top layer, an intermediate layer is etched away to render the top layer flexible to facilitate movement of the dielectric material in the space between the capacitor plates.

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Communication dated Oct. 27, 1999 from the European Patent Office with attached European Search Report dated Oct. 20, 1999.

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