Method of making a printhead having reduced surface roughness

Details Method of making a printhead having reduced surface roughness Method of making a printhead having reduced surface roughness

1997-11-21

2000-01-11

Nguyen, Nam

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

20419221, C23C 1434

Patent

active

060131608

ABSTRACT:
The nucleation efficiency of a thermal ink jet printhead is improved by providing a heater resistor with a thin planar oxide film formed over a conductive heater resistive layer. In a preferred embodiment, zirconium diboride is sputtered onto a silicon substrate surface to form a first, electrically conductive base portion of the resistor. At a predetermined time, during the sputtering process, oxygen is introduced to form a thin film of ZrB.sub.2 O.sub.x. The surface of this film is very smooth having a surface roughness of <5 nm RMS.

REFERENCES:
patent: Re32572 (1988-01-01), Hawkins et al.
patent: 4336548 (1982-06-01), Matsumoto
patent: 4774530 (1988-09-01), Hawkins
patent: 4951063 (1990-08-01), Hawkins et al.
patent: 5287622 (1994-02-01), Terai
patent: 5469200 (1995-11-01), Terai
Michael O'Horo et al. entitled "Effect of TIJ Heater Surface Topology on Vapor Bubble Nucleation", SPIE Journal, vol. 2658, pp. 58-64, Jan. 29, 1996.

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