Method of making a multilayer thin film structure

Details Method of making a multilayer thin film structure Method of making a multilayer thin film structure

1992-05-26

1993-11-30

McCamish, Marion E.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

430313, 430315, 430317, 156643, 437183, 437203, 437225, 437228, 437229, G03C 500, H01L 21283

Patent

active

052664465

ABSTRACT:
A method of making a multilayer thin film structure on the surface of a dielectric substrate which includes the steps of:

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Shaw, et al., Entitled "Photosensitive Glass for Producing Recessed Metallurgy, Eliminating Need for Planarazation", IBM Technical Disclosure Bulletin, vol. 26, No. 3A, p. 1094 (Aug. 1983).

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