Method of making a millimeter wave monolithic integrated circuit

Details Method of making a millimeter wave monolithic integrated circuit Method of making a millimeter wave monolithic integrated circuit

1989-01-23

1989-08-29

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156653, 1566591, 156657, 156662, 357 40, 357 65, 357 81, 437203, 437228, 437241, 437902, H01L 21306, B44C 122, C03C 1500, C03C 2506

Patent

active

048614262

ABSTRACT:
A method is provided of making a millimeter wave monolithic integrated ciit that allows for device isolation during epitaxial growth and integral heat sink with supporting circuitry on the substrate.

REFERENCES:
patent: 4675525 (1987-06-01), Amingual et al.

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