Method of making a dielectric structure for facilitating overetc

Details Method of making a dielectric structure for facilitating overetc Method of making a dielectric structure for facilitating overetc

1996-06-06

1998-06-16

Bowers, Jr., Charles L.

Fishing, trapping, and vermin destroying

437190, 437194, 437241, 437DIG978, 1566461, 1566431, H01L 2144

Patent

active

057669740

ABSTRACT:
Integrated circuit fabrication with a thin layer of oxynitride atop the interlevel dielectric, to provide an etch stop to withstand the overetch of the metal layer.

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