Method of making a charge-coupled device imager which includes a

Details Method of making a charge-coupled device imager which includes a Method of making a charge-coupled device imager which includes a

1984-07-23

1985-10-22

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

29576R, 148187, 156653, 156657, 156662, 357 15, 357 24, 357 30, 427 84, H01L 21306, B44C 122, C03C 1500, C23F 102

Patent

active

045486719

ABSTRACT:
A method of making an imager which includes substrate of single crystalline silicon having on one surface of a plurality of spaced detectors arranged in columns and a charge-coupled device between each pair of columns of the detectors. The charge-coupled devices are formed first with the gates of the charge-coupled devices defining detector areas of the substrate surface. A guard-ring is formed in each detector area with the edges of the gates around the detector area defining one edge of the guard-ring so that the guard-rings are aligned with the edges of the surrounding gates. A layer of insulating material is formed over the detector areas with the portion of the insulating layer over the guard-ring being thicker than the remaining portion of the insulating layer. The thinner portion of the insulating layer is removed leaving the thicker portion over the guard-ring region and with an edge of the thicker portion being substantially in alignment with an edge of the guard-ring region. A conductive layer is formed on the exposed portion of the detector areas of the substrate surface with the conductive layer forming a Schottky-barrier junction with the substrate.

REFERENCES:
patent: 3481781 (1969-12-01), Kern
"Design and Performance of 64.times.128 Element PtSi; Schottky-Barrier Infra-Red Charge-Coupled Device (IRCCD) Focal Plane Array", W. F. Kosonocky et al., SPIE, vol. 344, Infrared Sensor Technology (1982), pp. 66-77.
U.S. patent application of W. F. Kosonocky, Ser. No. 616,199, filed Jun. 1, 1984, Entitled "Infra-Red Charge-Coupled Device Image Sensor".

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