Method of making a cantilever stylus for an atomic force microsc

Details Method of making a cantilever stylus for an atomic force microsc Method of making a cantilever stylus for an atomic force microsc

1993-05-27

1994-08-09

Noland, Thomas P.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

29595, 156634, 437228, H05K 306, G01R 300, C23F 102, H01L 21465

Patent

active

053363698

ABSTRACT:
A method of making a cantilever stylus for an atomic force microscope comprises forming a film on a surface of a substrate, the film comprising a stylus material that is different from the material of the substrate. A resist thin film of a material different from the stylus material is formed on the surface of the stylus material so as to have a tip. The stylus material is then etched with an isotropic etching technique to a depth of etching greater than the radius of curvature of the tip of the resist film so that the stylus material, having two opposite principal surfaces, has a tip formed on one of the principal surfaces with a radius of curvature less than 0.1 .mu.m which protrudes beyond a tip of the other principal surface. At least the resist thin film and the substrate at the tips of the principal surfaces of the stylus material are then removed.

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"Scanning tunneling microscopy", Hansma, J. Appl. Phys. 61(2), Jan. 15, 1987, pp. R1-R23.
"New scanning tunneling microscopy tip for measuring surface topography", Akama et al., J. Vac. Sci. Technol. A 8(1), Jan./Feb. 1990, pp. 429-433.

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