Method of magnetically orienting thin magnetic films with a mult

Details Method of magnetically orienting thin magnetic films with a mult Method of magnetically orienting thin magnetic films with a mult

2000-02-07

2000-10-03

Diamond, Alan

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

20419211, 20419212, 20419213, 20419216, 20429802, 20429803, 20429804, 20429817, 20429819, 20429809, 335209, 335299, 335213, 335297, 335306, 335282, 118723FE, 118723FI, 427571, 427598, C23C 1435, H01F 500

Patent

active

061267902

ABSTRACT:
An electromagnet assembly magnetically orients a thin magnetic film deposited onto a surface of a substrate. The magnetic orientation can take place in a low-pressure processing environment such as during the deposition of the thin magnetic film or during a subsequent operation such as annealing. The electromagnet assembly includes a plate-shaped core located adjacent to the substrate and two or more electromagnetic coils that are wrapped in different directions around the core. Electrical currents conveyed through the electromagnetic coils are controlled for orienting a substantially uniaxial magnetic field throughout a range of angular positions in a plane of the substrate surface.

REFERENCES:
patent: 3077444 (1963-02-01), Hoh
patent: 3336154 (1967-08-01), Oberg et al.
patent: 4094764 (1978-06-01), Boucher et al.
patent: 4155825 (1979-05-01), Fournier
patent: 4247383 (1981-01-01), Greve et al.
patent: 4404534 (1983-09-01), Janvrin
patent: 4581118 (1986-04-01), Class et al.
patent: 4595482 (1986-06-01), Mintz
patent: 4673482 (1987-06-01), Setoyama et al.
patent: 4810346 (1989-03-01), Wolf et al.
patent: 4849250 (1989-07-01), Dee et al.
patent: 4853102 (1989-08-01), Tateishi et al.
patent: 4865709 (1989-09-01), Nakagawa et al.
patent: 4871433 (1989-10-01), Wagner et al.
patent: 5006218 (1991-04-01), Yoshida et al.
patent: 5006219 (1991-04-01), Latz et al.
patent: 5026470 (1991-06-01), Bonyhard et al.
patent: 5045166 (1991-09-01), Bobbio
patent: 5061838 (1991-10-01), Lane et al.
patent: 5117212 (1992-05-01), Yakamoto et al.
patent: 5367277 (1994-11-01), Kaidou
patent: 5460684 (1995-10-01), Saeki et al.
patent: 5612098 (1997-03-01), Tan et al.
patent: 5616370 (1997-04-01), Okuno et al.
patent: 5630916 (1997-05-01), Gerrish et al.
patent: 5858180 (1999-01-01), Hsu
patent: 5902466 (1999-05-01), Gerrish et al.
patent: 6042707 (2000-03-01), Moslehi et al.
patent: 6051113 (2000-04-01), Moslehi
Paper entitled "Manufacturing Techniques", pp. 1-28, (Date Unknown).
"Ferromagnetic Properties of Films" by Mitchell S. Cohen, M.I.T. Lincoln Laboratory, Lexington, Mass., Ch.17, pp. 17-1 thru 17-43. (Date Unknown).
"Relation of Thickness and Some Physical Properties of NiFe Thin Films" by R.M. Valletla, G. Guthmiller, and G. Gorman, J. Vac. Sci. Technol. A9 (4) Jul./Aug. 1991, American Vacuum Society, pp. 2093-2098.

Affiliated with

Also associated with

Rating

Method of magnetically orienting thin magnetic films with a mult does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of magnetically orienting thin magnetic films with a mult, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of magnetically orienting thin magnetic films with a mult will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-191209