Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2005-07-21
2010-06-08
Vanore, David A (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S306000, C250S307000, C250S311000, C250S397000, C250S36100C, C250S362000, C250S367000, C250S368000, C250S369000
Reexamination Certificate
active
07732762
ABSTRACT:
The invention relates to a method of inspecting a specimen surface. The method comprises the steps of generating a plurality of primary beams directed towards the specimen surface, focussing the plurality of primary beams onto respective loci on the specimen surface, collecting a plurality of secondary beams of charged particles originating from the specimen surface upon incidence of the primary beams, converting at least one of the collected secondary beams into an optical beam, and detecting the optical beam.
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Kruit Pieter
Nijkerk Michiel David
Bianco Paul D.
Fleit Martin
Fleit Gibbons Gutman Bongini & Bianco PL
Maskell Michael
Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk On
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