Method of inspecting a master member

Details Method of inspecting a master member Method of inspecting a master member

1987-03-10

1988-08-23

Rosenberger, R. A.

Optics: measuring and testing

By configuration comparison

356389, G01B 1100

Patent

active

047657430

ABSTRACT:
A method of inspecting a pattern of elements on a working plate includes producing a negative copy of the working plate and aligning the negative copy with a positive inspection plate having elements slightly larger than the elements of the working plate whereby flaws are revealed as light transmissive spots. The working plate and a negative inspection plate, having the elements slightly smaller than the elements of the working plate, are aligned and flaws are revealed as light transmissive spots.

REFERENCES:
patent: 3411007 (1968-12-01), Thompson
patent: 3711205 (1973-01-01), Tulk et al.
patent: 3758326 (1973-09-01), Hennings et al.

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