Method of inhibiting copper corrosion during supercritical...

Details Method of inhibiting copper corrosion during supercritical... Method of inhibiting copper corrosion during supercritical...

2005-03-30

2008-10-28

Smith, Zandra (Department: 2822)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S658000, C438S687000, C438S689000, C257SE21002

Reexamination Certificate

active

07442636

ABSTRACT:
A method for the pre-treatment of a wafer substrates with exposed metal surfaces is disclosed. The pre-treatment reduces oxidation of the exposed metal surfaces during subsequent supercritical cleaning processes.

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