Method of illuminating an object in a transmission electron micr

Details Method of illuminating an object in a transmission electron micr Method of illuminating an object in a transmission electron micr

1989-07-24

1991-05-07

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250311, 250396R, H01J 2946

Patent

active

050139134

ABSTRACT:
The invention is directed to a method of illuminating an object in a transmission electron microscope. For illuminating the object, two condenser lenses are used such that they image an image of the electron source with different demagnifications. This crossover is imaged in the focal plane of a single-field condenser objective lens by means of a third condenser lens 14 for TEM-operation whereby the illumination aperture can be adjusted with respect to its magnitude. The electron beam is shaped ahead of the single-field condenser objective lens by two diaphragms arranged in different planes and by means of at least one deflection system such that the magnitude of the illumination field on the object is only slightly larger than the region magnified by the electron microscope. The magnitude of the illumination field and the illuminating aperture can be adjusted independently of each other.

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"Zeiss Information" pp. 4 and 5, MEM Nr. 4, Sep. 1985.

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