Heat exchange – Structural installation – Heating and cooling
Patent
1993-01-28
1997-03-04
Chambers, A. Michael
Heat exchange
Structural installation
Heating and cooling
165 61, 165 805, 118725, F25B 2900, C23C 1458
Patent
active
056070098
ABSTRACT:
Glass substrates suitable for thin film processing can be batch heated to processing temperatures and batch cooled after processing by radiant heating and cooling in a vacuum chamber. The heating and/or cooling chamber is fitted with a cassette including heat conductive shelves that can be heated or cooled, interleaved by the glass substrates mounted on supports so that a gap exists between the shelves and the substrates. As the shelves provide heating or cooling, the glass substrates are radiantly heated or cooled by the shelves, thereby providing uniform heating or cooling of the glass substrates so as to avoid damage or warpage of the substrates.
A vacuum system for processing the substrates includes batch-type heating and cooling of the substrates using the chambers of the invention in combination with one-at-a-time film processing chambers that can deposit one or more thin films on the substrates.
REFERENCES:
patent: 4603243 (1986-07-01), Septfons et al.
patent: 4609037 (1986-09-01), Wheeler et al.
patent: 4951601 (1990-08-01), Maydan et al.
patent: 4979464 (1990-12-01), Kunze-Concewitz et al.
patent: 5097890 (1992-03-01), Nakao
patent: 5135047 (1992-08-01), Dobran
Joint Development Agreement Between Applied Materials, Inc. (Applicant's Assignee) and two unrelated companies (Companies A & B), dated May 29, 1991 (Exhibit A hereto).
Berkstresser David
Turner Norman L.
White John M.
Applied Materials Inc.
Chambers A. Michael
Edelman Lawrence
Morris Birgit E.
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