Method of heating and cooling large area glass substrates

Details Method of heating and cooling large area glass substrates Method of heating and cooling large area glass substrates

1995-06-05

1997-10-07

Bowers, Jr., Charles L.

Fishing, trapping, and vermin destroying

437247, 427314, 414937, 414938, H01L 21324

Patent

active

056747861

ABSTRACT:
Glass substrates suitable for thin film processing can be batch heated to processing temperatures and batch cooled after processing by radiant heating and cooling in a vacuum chamber. The heating and/or cooling chamber is fitted with a cassette including heat conductive shelves that can be heated or cooled, interleaved by the glass substrates mounted on supports so that a gap exists between the shelves and the substrates. As the shelves provide heating or cooling, the glass substrates are radiantly heated or cooled by the shelves, thereby providing uniform heating or cooling of the glass substrates so as to avoid damage or warpage of the substrates. A vacuum system for processing the substrates includes batch-type heating and cooling of the substrates using the chambers of the invention in combination with one-at-a-time film processing chambers that can deposit one or more thin films on the substrates.

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