Method of growing epitaxial layers from a liquid phase

Details Method of growing epitaxial layers from a liquid phase Method of growing epitaxial layers from a liquid phase

1977-11-09

1983-02-15

Bernstein, Hiram

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

C30B 1900

Patent

active

043739881

ABSTRACT:
A rotary head is provided with supply chambers near the center of rotation ommunicating with slot-like channels extending radially to a surrounding annular space. Substrates are set into holders, such as dovetail guides in the channel walls to expose surfaces to the liquid that flows by through the channels from the supply chambers when the head is set into rotation. The used liquid, after it reaches the annular space, flows down into a catch basin at the bottom of a surrounding casing, which casing also has an opening at the top for loading the supply chambers.

REFERENCES:
patent: 1353571 (1920-09-01), Dreibrodt
patent: 2459869 (1949-01-01), Christensen
patent: 3335084 (1967-08-01), Mall
patent: 3697330 (1972-10-01), Minden
patent: 3713883 (1973-01-01), Lien
patent: 3755013 (1973-08-01), Hollan
patent: 3873463 (1975-03-01), Tolksdorf
patent: 3913212 (1975-10-01), Bachmann et al.
Blum, IBM Tech. Discl. Bull., vol. 15 #7, Dec. '72, p. 2091.

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