Method of frequency tuning a piezoelectric device and apparatus

Details Method of frequency tuning a piezoelectric device and apparatus Method of frequency tuning a piezoelectric device and apparatus

1993-12-21

1995-04-18

Powell, William

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156626, 156643, 156656, 156345, B44C 122, C23F 100

Patent

active

054075254

ABSTRACT:
A method of frequency tuning a piezoelectric device and apparatus for the implementation thereof. A piezoelectric device having at least one resonating function is formed by two metallized electrodes facing each other, on a face of a plate made of a piezoelectric material. An arranging step arranges the plate, fitted with the electrodes, in a tuning position in proximity to an ion source. Then, an exposing step exposes the plate to an ion flux produced by the source and the ions etch the metal. A measuring step measures the resonant frequency of the resonating function while the plate is in a tuning position. Finally, a raising step raises at least one electrode exposed to the ions to an adjustable bias voltage to control the rate at which the metal on the electrode is etched.

REFERENCES:
patent: 4638536 (1987-01-01), Vig
Patent Abstracts of Japan, vol. 016, No. 526, Oct. 28, 1992 & JP-A-41 96 708, Hanji Motoyasu, "Frequency Adjustment Device and Method for Piezeoelectric Element."
Patent Abstracts of Japan, vol. 016, No. 526, Oct. 28, 1992 & JP-A.varies.41 96 610, Akaha Takashi, "Frequency Adjustment Method for Piezoelectric Vibrator."
Castellano, R. H., et al., Proc. of the 29th Annual Frequency Control Symposium, 1975, pp. 128-134, "A Survey of Ion Beam Milling Techniques for Piezoelectric Device Fabrication."

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