Method of forming piezoelectric actuator of inkjet head

Details Method of forming piezoelectric actuator of inkjet head Method of forming piezoelectric actuator of inkjet head

2006-10-20

2009-10-20

Trinh, Minh (Department: 3729)

Metal working

Piezoelectric device making

C029S890100, C347S070000, C310S324000

Reexamination Certificate

active

07603756

ABSTRACT:
A method of forming a piezoelectric actuator of an inkjet head formed on a vibrating plate to provide a driving power for ejecting ink to each of pressure chambers is provided. The method includes forming a lower electrode on a vibrating plate, forming a piezoelectric layer on the lower electrode to be located above each of pressure chambers, forming a protecting layer covering the lower electrode and the piezoelectric layer, exposing an upper surface of the piezoelectric layer by decreasing a thickness of the protecting layer and the piezoelectric layer, forming an upper electrode on the upper surface of the piezoelectric layer, removing the protecting layer. According to the present invention, since the piezoelectric layer having a flat upper surface is formed in uniform figure, area and thickness of the upper electrode formed thereon is uniformly controlled.

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European Search Report issued Jan. 12, 2009 in European Application No. 06253465.6.

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