Method of forming pattern of semiconductor device

Details Method of forming pattern of semiconductor device Method of forming pattern of semiconductor device

2011-04-05

2011-04-05

Duda, Kathleen (Department: 1722)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

C430S330000

Reexamination Certificate

active

07919228

ABSTRACT:
The present invention relates to a method of forming a pattern of a semiconductor device. According to the method, patterns are formed on a substrate. First photoresist patterns are formed in regions where the patterns are opened. The first photoresist patterns are diffused to upper corners of the patterns, thus forming second photoresist patterns. The patterns are etched using the second photoresist patterns as an etch-stop layer. Accordingly, smaller photomask patterns can be formed.

REFERENCES:
patent: 6365325 (2002-04-01), Chiang et al.
patent: 2008/0206914 (2008-08-01), Haase et al.
patent: 10-2001-0080842 (2001-08-01), None

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